{"id":302913,"date":"2018-12-18T14:52:09","date_gmt":"2018-12-18T13:52:09","guid":{"rendered":"https:\/\/www.deltamicroscopies.com\/produit\/chessy-test-specimen\/"},"modified":"2018-12-18T14:52:09","modified_gmt":"2018-12-18T13:52:09","slug":"chessy-test-specimen","status":"publish","type":"product","link":"https:\/\/www.deltamicroscopies.com\/en\/products\/chessy-test-specimen\/","title":{"rendered":"Chessy Test Specimen"},"content":{"rendered":"<p><strong>The Structure<\/strong> There are more than 1.6 million gold squares of 1\u00b5 size on silicon forming a 4-fold checkerboard pattern in an area of 5 mm square. The smallest metric checkerboard has a size of 10 x 10\u00b5. Such checkerboards form larger metric checkerboards of 100 x 100\u00b5 &#8211; These again form checkerboards of 1 mm square. Finally, such 1 mm squares are arranged in the same manner covering a field of 5 mm square. The edges of the empty corners in 0.1 and 1 mm checkerboards are additionally marked. The surrounding frame is 10\u00b5 wide and has an outer side length of 5.04 mm. The pattern was directly written by e-beam lithography using the new ZBA 31\/32 from JENOPTIK. <strong>Applications<\/strong> <strong>Imaging<\/strong> &#8211; Calibration of SEM magnification in all ranges between 20x and 50,000x. &#8211; Check of equal scaling in X and Y &#8211; Check of orthogonality and distortion &#8211; Resolution test at high magnification on the edges of the gold squares <strong>Motorized Stages<\/strong> (especially for use with ESCOSY) &#8211; Measurement of reproducibility using stored position &#8211; Calibration of readings in X and Y &#8211; Calibration of stage orthogonality &#8211; Measurement of absolute positioning accuracy <strong>Experimental Electron Lithography<\/strong> (use with attachment ELPHY or PROXY-WRITER) &#8211; Generation of metric writing fields between 10\u00b5 and 5mm square via mark recognition and alignment &#8211; Measurement of SEM distortion at any magnification via mark recognition on different places &#8211; Check of defocusing in outer areas<\/p>\n<p><a href=\"https:\/\/www.deltamicroscopies.com\/wp-content\/uploads\/2018\/12\/TDS_Chessy_test_specimen.pdf\">Technical Data Sheet : Chessy_test_specimen<\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p><span style=\"color: #001000; font-size: 12pt;\">The Chessy test specimen comprises more than 1.6 million gold squares on silicon which form a four-fold chequerboard pattern in an area of 5mm square. Overall Size of specimen is 10 mm x 10 mm<\/span><\/p>\n<h4><strong>each<\/strong><\/h4>\n","protected":false},"featured_media":288081,"comment_status":"open","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"","_et_pb_old_content":"","_et_gb_content_width":"","inline_featured_image":false},"product_brand":[],"product_cat":[1388,1096],"product_tag":[],"class_list":{"0":"post-302913","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-sem-calibration-en","7":"product_cat-standards","9":"first","10":"instock","11":"taxable","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Chessy Test Specimen - Delta Microscopies<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.deltamicroscopies.com\/en\/products\/chessy-test-specimen\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Chessy Test Specimen - Delta Microscopies\" \/>\n<meta property=\"og:description\" content=\"The Chessy test specimen comprises more than 1.6 million gold squares on silicon which form a four-fold chequerboard pattern in an area of 5mm square. 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