YPS TFE exchange module gun assembly for FEI FEG, exchange only


REF: D14-FX4920


The YPS Schottky type thermal field emission sources are an excellent choice to replace used TFE sources in electron beam systems, including FESEM, SFEG-SEM, FETEM, EPMA, Auger and CD-SEM systems. The YPS sources are drop-in replacements for existing FEI and Denka style sources also known as 184 and 174 type suppressors. The YPS Schottky TFE source consists of a single crystal (100) tungsten wire with a very sharp tip including a zirconium reservoir around the tungsten tip wire. The tip is mounted on a hairpin filament which is used to maintain the tip ate a temperature of around 1800K. This assembly is mounted in a cylindrical suppressor electrode with an aperture through which the sharp tip protrudes. Electrons are emitted from the tip due to both thermal excitation and the electrical field at the tip. The YPS Schottky TFE source tip typically has a radius of 0.3µm and protrudes around 250µm to ensure high brightness of the source.

YPS exchange Schottky TFE module assemblies for FEI FEG and Sirion SFEG
The YPS FEI FEG and SFEG Schottky TFE module is a complete exchange module assembly replacement for the FEI TFE module used in the FEI XL-30, Sirion, Inspect and Nova NanoSEM systems. The FEG or SFEG emitter module is supplied within the gun assembly and is factory pre-aligned. It is available for the FEI systems units, the FEG TFE module assembly and for the SFEG Sirion module assembly. This is available as a complete gun module exchange only. The complete TFE gun assembly will be shipped under inert nitrogen gas with a protective container mounted on the gun assembly flange. The type of TFE source can be identified through the silver label on the gun assembly flange


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