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 | The EM-Tec MCS-0.1 calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-T32000 EM-Tec MCS-0.1TR is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard.
Example of wafer level certificate of traceability for the EM-Tec MCS-0.1TR magnification calibration standard, 2.5mm to 100nm. |
 | The EM-Tec MCS-0.1-XY calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. Brigth chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features in X and Y direction. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in X and Y direction. The 31-C32000 EM-Tec MCS-0.1CF-XY is individually certified utilizing a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes. |
| The EM-Tec MCS-0.1 calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The 31-T32000 EM-Tec MCS-0.1TR is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard.
Example of wafer level certificate of traceability for the EM-Tec MCS-0.1TR magnification calibration standard, 2.5mm to 100nm. |
| The EM-Tec MCS-0.1-XY calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger and SIMS systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for calibration down to 2.5µm and gold over chromium for 1µm to 100nm calibration features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm in both X and Y direction. The 31-T32040 EM-Tec MCS-0.1TR-XY is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard. |
 | The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.
The 31-C31000 EM-Tec MCS-1CF is individually certified utilizing a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs.
Example of individual certificate of calibration for the EM-Tec MCS-1CF certified magnification calibration standard, 2.5mm to 1µm. |
| The EM-Tec MCS-1-XY calibration standard has been developed to accurately calibrate table top SEM, reflected light microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Bright chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1-XY are:
2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm in both X and Y direction.
The 31-C31000 EM-Tec MCS-1CF-XY is individually certified utilizing a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs. |
