Description

EM-Tec SEM Resolution Test Standard

     
EM-Tec Au on C resolution standard 1, 5-200nm

Quality resolution standards are essential tools for obtaining optimum resolution, settings, beam size and astigmatism correction on SEM, CD-SEMs, FESEMs, FIB, Microprobe, Auger and SIMS systems. The industry standards are:

• Gold particles on a carbon substrate
• Tin spheres on a carbon substrate.

Gold particles on carbon have rich features and provide excellent signal strength for secondary electron (SE) imaging. They are equally suitable for low voltage backscatter electron (BSE) imaging. The nearly perfect round tin spheres have an easy to recognize shape and can be used where gold is not tolerated. Multiple particle sizes are offered for different imaging applications. The carbon substrates are all 6mm in diameter and 2mm in height.

EM-Tec gold on carbon resolution standards

The gold particles on the gold on carbon resolution test specimens provide relatively sharp features, dispersed individual particles and excellent contrast against the carbon substrate. There are 4 different sizes of EM-Tec gold on carbon resolution test specimens available:

• EM-Tec 1 with Au particles ranging from 5-200nm. Ideal for resolution testing on standard SEMs. Use at 15,000x magnification or higher.
• EM-Tec 2 with Au particles ranging from 30-300nm. This calibration specimen has been developed for low kV and medium magnifications resolution testing. Note the nice twin features on the Au particles. Use at 10,000x magnification or higher.
• EM-Tec 3 with Au particles ranging from 3-50nm for high resolution testing  of SEMs and FESEMs. Use at 50,000x magnification or higher.
• EM-Tec 4 with Au particles ranging from 2-30nm for ultra-high resolution testing of FESEMs. Use at 100,000x magnification or higher.

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The EM-Tec resolution standards are available unmounted or ready mounted on popular SEM stubs.

  
31-022100 EM-Tec Sn on C resolution standard 6, 5nm-30um

EM-Tec tin on carbon resolution standards

Tin spheres on carbon provide an excellent test specimen to determine the resolution of SEM, FESEM, FIB, CD-SEM, Microprobe, Auger and SIMS systems. The nearly perfect round spheres in various sizes are especially suitable for determining image quality, brightness & contrast (grey levels), optimum probe size and astigmatism correction. Tin on carbon is used where gold on carbon is not allowed in the SEM. The shape of the round spheres are easy to recognize and easier to use than gold on carbon. However, the overall signal level is lower than that of gold on carbon test specimens. There are two sizes of tin spheres resolution calibration standards available:

• EM-Tec 6 with Sn spheres ranging from 5nm – 30μm. This resolution standard covers a wide magnification range and is also useful for the medium and lower magnification range, starting at around 100x. Also useful at lower kV ranges due to the larger spheres. Start at lower magnification and zoom in on the smaller spheres at (much) higher magnifications.
• EM-Tec 7 with Sn spheres ranging from 10-100nm. Excellent test specimen for high resolution SEMs and FESEMs with a nice smooth layer of Sn spheres. Use at 30,000x magnification or higher.

The EM-Tec resolution standards are available unmounted or ready mounted on popular SEM stubs.