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Description
Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards
combines calibration and imaging quality assessment in a single standard
The new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging, optical quality control systems and low magnification SEM imaging for:
- magnification calibration
- critical dimension measurements
- distortion correction
- imaging quality assessment
- quality control measurements.
There are four distinct patterns on the MTC-5 calibration standard:
- Circle patterns from 5µm to 5mm diameter
- Square patterns from 5 x 5µm to 5x5mm
- Hexagon patterns from 5µm to 5mm across
- Cross scale pattern of 5x5mm with 0.002mm divisions
The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.
Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of traceability is supplied with each standard. We offer:
- MTC-5 with Cr lines on silicon for bright field imaging
Specifications for the Micro-Tec MTC-5 multiple target calibrating graticule standards:
| Substrate | 525µm thick boron doped ultra-flat wafer with <100> orientation |
| Conductive | Excellent; 5-10 Ohm resistivity |
| Patterns | Circles, squares, hexagons, cross scale |
| Pattern size | 5 x 5mm (4x) |
| Lines | 75nm thick, pure bright Chromium lines/features (measure center to center)
1µm wide lines 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60, 65, 70, 75, 80, 85, 90, 95 and 100µm apart |
| Cross scale pattern |
5mm wide lines, 5 x 5mm with 0.002mm divisions |
| Die size | 12 x 12mm |
| Application | Reflective light, scanning electron microscopy, optical imaging systems |
| Identification | Product ID with serial number etched |
| Mounting | Unmounted, mounting optionally available |
| Supplied | Supplied in a Gel-Pak box |
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